Zone-doubled Fresnel zone plates for high-resolution hard X-ray full-field transmission microscopy
نویسندگان
چکیده
Full-field transmission X-ray microscopy is a unique non-destructive technique for three-dimensional imaging of specimens at the nanometer scale. Here, the use of zone-doubled Fresnel zone plates to achieve a spatial resolution better than 20 nm in the hard X-ray regime (8-10 keV) is reported. By obtaining a tomographic reconstruction of a Ni/YSZ solid-oxide fuel cell, the feasibility of performing three-dimensional imaging of scientifically relevant samples using such high-spatial-resolution Fresnel zone plates is demonstrated.
منابع مشابه
Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime.
X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray ...
متن کاملDemonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy.
To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that ...
متن کاملSilicon Fresnel zone plates for high heat load X-ray microscopy
A technique to produce diffractive X-ray lenses optimized for high heat load applications is demonstrated. The lenses are made from single crystal silicon membranes, which have uniform thermal conductivity and homogeneous thermal expansion. Silicon Fresnel zone plates with an outermost zone width down to 30 nm were produced by means of electron beam lithography and reactive ion etching. They we...
متن کاملHard X-ray microscopy with Zernike phase contrast.
Zernike phase contrast has been added to a full-field X-ray microscope with Fresnel zone plates that was in operation at 6.95 keV. The spatial resolution has also been improved by increasing the magnification of the microscope objective looking at the CsI(Tl) scintillation crystal. Cu no. 2000 meshes and a zone plate have been imaged to see the contrast as well as the spatial resolution. A Halo...
متن کاملHigh-efficiency Fresnel zone plates for hard X-rays by 100 keV e-beam lithography and electroplating
The fabrication and characterization of Fresnel zone plates (FZPs) for hard X-ray microscopy applications are reported. High-quality 500 nm- and 1 µm-thick Au FZPs with outermost zone widths down to 50 nm and 70 nm, respectively, and with diameters up to 600 µm were fabricated. The diffraction efficiencies of the fabricated FZPs were measured for a wide range of X-ray energies (2.8-13.2 keV) sh...
متن کامل